Invention Grant
- Patent Title: Process for forming a film on a substrate using multi-port injection assemblies
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Application No.: US15863340Application Date: 2018-01-05
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Publication No.: US10262859B2Publication Date: 2019-04-16
- Inventor: Joe Margetis , John Tolle , Gregory Bartlett , Nupur Bhargava
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer L.L.P.
- Main IPC: H01L21/02
- IPC: H01L21/02 ; C23C16/455 ; C23C16/24
Abstract:
A gas distribution system is disclosed in order to obtain better film uniformity on a substrate in a cross-flow reactor. The better film uniformity may be achieved by an asymmetric bias on individual injection ports of the gas distribution system. The gas distribution may allow for varied tunability of the film properties.
Public/Granted literature
- US20180151358A1 RADIAL AND THICKNESS CONTROL VIA BIASED MULTI-PORT INJECTION SETTINGS Public/Granted day:2018-05-31
Information query
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