Invention Grant
- Patent Title: Cover plate for wind mark control in spin coating process
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Application No.: US13770771Application Date: 2013-02-19
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Publication No.: US10262880B2Publication Date: 2019-04-16
- Inventor: Derek W. Bassett , Wallace P. Printz , Joshua S. Hooge , Katsunori Ichino , Yuichi Terashita , Kousuke Yoshihara
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Wood Herron & Evans LLP
- Main IPC: G03F7/16
- IPC: G03F7/16 ; B05C11/08 ; H01L21/67

Abstract:
Techniques disclosed herein provide an apparatus and method of spin coating that inhibits the formation of wind marks and other defects from turbulent fluid-flow, thereby enabling higher rotational velocities and decreased drying times, while maintaining film uniformity. Techniques disclosed herein include a fluid-flow member, such as a ring or cover, positioned or suspended above the surface of a wafer or other substrate. The fluid-flow member has a radial curvature that prevents wind marks during rotation of a wafer during a coating and spin drying process.
Public/Granted literature
- US20140235070A1 COVER PLATE FOR WIND MARK CONTROL IN SPIN COATING PROCESS Public/Granted day:2014-08-21
Information query
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