- 专利标题: Method to test the quality factor of a MEMS gyroscope at chip probe
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申请号: US14987685申请日: 2016-01-04
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公开(公告)号: US10267636B1公开(公告)日: 2019-04-23
- 发明人: Sudheer S. Sridharamurthy , Tony Maraldo , Zheng-Yao Sun , Wenhua Zhang , Te-Hsi Terrence Lee , Sanjay Bhandari , Joseph Rastegar
- 申请人: mCube, Inc.
- 申请人地址: US CA San Jose
- 专利权人: mCube, Inc.
- 当前专利权人: mCube, Inc.
- 当前专利权人地址: US CA San Jose
- 代理机构: Ogawa P.C.
- 代理商 Richard T. Ogawa
- 主分类号: G01C19/5684
- IPC分类号: G01C19/5684 ; B81C99/00
摘要:
A method for a MEMS device comprises determining in a computer system, a first driving signal for the MEMS device in response to a first time delay and to a base driving signal, applying the first driving signal to the MEMS device to induce the MEMS device to operate at a first frequency, determining a second driving signal for the MEMS device in response to a second time delay and to the base driving signal, applying the second driving signal to the MEMS device to induce the MEMS device to operate at a second frequency, determining a first quality factor associated with the MEMS device in response to the first frequency and the second frequency, determining a quality factor associated with the MEMS device in response to the first quality factor, and determining whether the quality factor associated with the MEMS device, exceeds a threshold quality factor.
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