- Patent Title: Method to test the quality factor of a MEMS gyroscope at chip probe
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Application No.: US14987685Application Date: 2016-01-04
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Publication No.: US10267636B1Publication Date: 2019-04-23
- Inventor: Sudheer S. Sridharamurthy , Tony Maraldo , Zheng-Yao Sun , Wenhua Zhang , Te-Hsi Terrence Lee , Sanjay Bhandari , Joseph Rastegar
- Applicant: mCube, Inc.
- Applicant Address: US CA San Jose
- Assignee: mCube, Inc.
- Current Assignee: mCube, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Ogawa P.C.
- Agent Richard T. Ogawa
- Main IPC: G01C19/5684
- IPC: G01C19/5684 ; B81C99/00

Abstract:
A method for a MEMS device comprises determining in a computer system, a first driving signal for the MEMS device in response to a first time delay and to a base driving signal, applying the first driving signal to the MEMS device to induce the MEMS device to operate at a first frequency, determining a second driving signal for the MEMS device in response to a second time delay and to the base driving signal, applying the second driving signal to the MEMS device to induce the MEMS device to operate at a second frequency, determining a first quality factor associated with the MEMS device in response to the first frequency and the second frequency, determining a quality factor associated with the MEMS device in response to the first quality factor, and determining whether the quality factor associated with the MEMS device, exceeds a threshold quality factor.
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