Invention Grant
- Patent Title: Dryness/wetness responsive sensor having first and second wires spaced 5 nm to less than 20 μm apart
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Application No.: US15327103Application Date: 2015-07-21
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Publication No.: US10267756B2Publication Date: 2019-04-23
- Inventor: Jin Kawakita , Tadashi Shinohara , Toyohiro Chikyo , Toshihide Nabatame , Akihiko Ohi , Tomoko Ohki
- Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE
- Applicant Address: JP Ibaraki
- Assignee: NATIONAL INSTITUTE FOR MATERIALS SCIENCE
- Current Assignee: NATIONAL INSTITUTE FOR MATERIALS SCIENCE
- Current Assignee Address: JP Ibaraki
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JP2014-149505 20140723
- International Application: PCT/JP2015/070692 WO 20150721
- International Announcement: WO2016/013544 WO 20160128
- Main IPC: G01N27/04
- IPC: G01N27/04 ; G01N17/04 ; G01N27/12 ; G01N27/22 ; G01N17/00
Abstract:
A dryness/wetness responsive sensor having decreased size, and improved sensitivity and responsiveness. The present invention comprises a thin wire of a first metal and a thin wire of a second metal, which is different from the first metal, wherein the thin wires run in juxtaposition with each other on an insulating substrate, and wherein the spacing between the first thin wire and the second thin wire is in the range of 5 nm or more and less than 20 μm.
Public/Granted literature
- US20170167995A1 HIGH-SPEED RESPONSE/HIGH-SENSITIVITY DRYNESS/WETNESS RESPONSIVE SENSOR Public/Granted day:2017-06-15
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