Invention Grant
- Patent Title: Asymmetric formation of epi semiconductor material in source/drain regions of FinFET devices
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Application No.: US15874341Application Date: 2018-01-18
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Publication No.: US10269932B1Publication Date: 2019-04-23
- Inventor: Ankur Arya , Brian Greene , Qun Gao , Christopher Nassar , Junsic Hong , Vishal Chhabra
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L27/01
- IPC: H01L27/01 ; H01L29/66 ; H01L21/8234 ; H01L29/78 ; H01L29/06 ; H01L29/08

Abstract:
One illustrative method disclosed herein includes, among other things, forming a first fin having first and second opposing sidewalls and forming a first sidewall spacer positioned adjacent the first sidewall and a second sidewall spacer positioned adjacent the second sidewall, wherein the first sidewall spacer has a greater height than the second sidewall spacer. In this example, the method further includes forming epitaxial semiconductor material on the fin and above the first and second sidewall spacers.
Information query
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