Invention Grant
- Patent Title: Multi-pressure MEMS package
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Application No.: US15626764Application Date: 2017-06-19
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Publication No.: US10273144B2Publication Date: 2019-04-30
- Inventor: Yu-Chia Liu , Chia-Hua Chu , Chun-Wen Cheng , Kuei-Sung Chang , Jung-Huei Peng
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L29/82
- IPC: H01L29/82 ; B81B3/00 ; B81B7/02

Abstract:
The present disclosure relates to a microelectromechanical systems (MEMS) package having two MEMS devices with different pressures, and an associated method of formation. In some embodiments, the (MEMS) package includes a device substrate and a cap substrate bonded together. The device substrate includes a first trench and a second trench. A first MEMS device is disposed over the first trench and a second MEMS device is disposed over the second trench. A first stopper is raised from a first trench bottom surface of the first trench but below a top surface of the device substrate and a second stopper is raised from a second trench bottom surface of the second trench but below the top surface of the device substrate. A first depth of the first trench is greater than a second depth of the second trench.
Public/Granted literature
- US20170283250A1 MULTI-PRESSURE MEMS PACKAGE Public/Granted day:2017-10-05
Information query
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