- Patent Title: Laser sustained plasma light source with graded absorption features
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Application No.: US15360397Application Date: 2016-11-23
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Publication No.: US10283342B2Publication Date: 2019-05-07
- Inventor: Ilya Bezel , Anatoly Shchemelinin , Kenneth P. Gross , Matthew Panzer , Anant Chimmalgi , Lauren Wilson , Joshua Wittenberg
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: H01J61/02
- IPC: H01J61/02 ; H01J61/04 ; H01J61/52 ; H01J65/04 ; H01J61/30

Abstract:
A laser-sustained plasma lamp includes a gas containment structure configured to contain a volume of gas. The gas containment structure is configured to receive pump illumination from a pump laser for generating a plasma within the volume of gas. The gas containment structure includes one or more transmissive structures being at least partially transparent to the pump illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transmissive structures have a graded absorption profile so as to control heating of the one or more transmissive structures caused by the broadband radiation emitted by the plasma.
Public/Granted literature
- US20170164457A1 Laser Sustained Plasma Light Source with Graded Absorption Features Public/Granted day:2017-06-08
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