Invention Grant
- Patent Title: Via support structure under pad areas for BSI bondability improvement
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Application No.: US16046183Application Date: 2018-07-26
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Publication No.: US10283549B2Publication Date: 2019-05-07
- Inventor: Sin-Yao Huang , Ching-Chun Wang , Dun-Nian Yaung , Feng-Chi Hung
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
Some embodiments of the present disclosure relate to a method of forming an integrated chip. The method includes forming a first interconnect wire within a first inter-level dielectric (ILD) layer over a substrate. One or more vias are formed on the first interconnect wire and within a second ILD layer separated from the substrate by the first ILD layer. One or more additional vias are formed within the second ILD layer. Respective ones of the one or more vias have a larger size than respective ones of the one or more additional vias. A thickness of the substrate is reduced, and the substrate is etched to form a bond pad opening extending through the substrate to the first interconnect wire. A bond pad is formed within the bond pad opening and directly over the one or more vias.
Public/Granted literature
- US20180350865A1 VIA SUPPORT STRUCTURE UNDER PAD AREAS FOR BSI BONDABILITY IMPROVEMENT Public/Granted day:2018-12-06
Information query
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