Invention Grant
- Patent Title: Thin body field effect transistor including a counter-doped channel area and a method of forming the same
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Application No.: US15957072Application Date: 2018-04-19
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Publication No.: US10283642B1Publication Date: 2019-05-07
- Inventor: Alban Zaka , Ignasi Cortes Mayol , Tom Herrmann , El Mehdi Bazizi , Luca Pirro
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L29/08

Abstract:
Manufacturing techniques and related semiconductor devices are disclosed in which the channel region of analog transistors and/or transistors operated at higher supply voltages may be formed on the basis of a very thin semiconductor layer in an SOI configuration by incorporating a counter-doped region into the channel region at the source side of the transistor. The counter-doped region may be inserted prior to forming the gate electrode structure. With this asymmetric dopant profile in the channel region, superior transistor performance may be obtained, thereby obtaining a performance gain for transistors formed on the basis of a thin semiconductor base material required for the formation of sophisticated fully depleted transistor elements.
Information query
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