Invention Grant
- Patent Title: Semiconductor devices and methods of fabricating the same
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Application No.: US15666903Application Date: 2017-08-02
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Publication No.: US10283698B2Publication Date: 2019-05-07
- Inventor: Seung Pil Ko , Kiseok Suh , Kilho Lee , Daeeun Jeong
- Applicant: Seung Pil Ko , Kiseok Suh , Kilho Lee , Daeeun Jeong
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2017-0003664 20170110
- Main IPC: H01L43/02
- IPC: H01L43/02 ; H01L23/522 ; H01L23/528 ; H01L43/08 ; H01L27/22 ; H01L21/768 ; H01L43/12 ; H01L23/485 ; H01L23/532

Abstract:
A device, which may include a semiconductor device, may include a contact plug, a first barrier metal covering a bottom surface of the contact plug and a lower sidewall of the contact plug, such that the first barrier metal exposes an upper sidewall of the contact plug, and an insulation pattern covering the upper sidewall of the contact plug such that the insulation pattern isolates the first barrier metal from exposure. A magnetic tunnel junction pattern may cover a top surface of the contact plug. Each element of the contact plug, the first barrier metal, and the insulation pattern may be in a contact hole of a first interlayer dielectric layer.
Public/Granted literature
- US20180198059A1 SEMICONDUCTOR DEVICES AND METHODS OF FABRICATING THE SAME Public/Granted day:2018-07-12
Information query
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