Invention Grant
- Patent Title: Fluid monitoring apparatus
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Application No.: US14854625Application Date: 2015-09-15
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Publication No.: US10288456B2Publication Date: 2019-05-14
- Inventor: Thomas H. Baum , Ing-Shin Barry Chen , Richard D. Chism
- Applicant: Entegris, Inc.
- Applicant Address: US MA Billerica
- Assignee: Entegris, Inc.
- Current Assignee: Entegris, Inc.
- Current Assignee Address: US MA Billerica
- Agency: Entegris, Inc.
- Main IPC: G01D11/24
- IPC: G01D11/24

Abstract:
A fluid monitoring apparatus, including a circuitry housing containing circuitry for processing fluid sensing signals and responsively transmitting an output, with a sensor assembly adapted for mechanical and electrical coupling to the circuitry housing. The sensor assembly includes at least one sensing member arranged to respond to a fluid species of interest in the monitored fluid, for generation of an output. The apparatus includes at least one of (A) a printed circuit board adapted to engage the circuitry housing and to mechanically couple to the sensor assembly, (B) the sensor assembly including a base and sensing element removably connected to the base by press-fit coupling elements, and (C) the sensor assembly including a base and a sensing filament connected thereto, and a filament guard to protectively circumscribe the sensing filament.
Public/Granted literature
- US20160003651A1 FLUID MONITORING APPARATUS Public/Granted day:2016-01-07
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