中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

6 records (took 0.033 seconds)

    Refillable ampoule with purge capability
    1.
    发明授权
    Refillable ampoule with purge capability 有权

    公开(公告)号：US10551004B2

    公开(公告)日：2020-02-04

    申请号：US15134548

    申请日：2016-04-21

    Applicant: Entegris, Inc.

    Inventor： Richard D. Chism ,  Andy Krell

    IPC: C23C16/44 ,  F17C13/04 ,  H01L21/67 ,  C23C16/448 ,  C23C16/455 ,  F17D1/04 ,  C23C14/48 ,  G03F7/20

    Abstract: A fluid delivery system adapted to isolate an ampoule and/or process line during purge, including an inlet control valve connecting a source of pressurized gas to a refillable ampoule, an outlet control valve connecting the refillable ampoule to a location of use, a process control valve connecting a process line to the refillable ampoule, a process isolation valve, and a purge supply valve, e.g., a three-way purge supply valve, arranged between the process isolation valve and the process control valve. A method of purging a fluid delivery system is also disclosed, including closing a process isolation valve, connecting a process line to a refillable ampoule, supplying a purge gas through a purge supply valve, e.g., a three-way purge supply valve, and cycling open and close at least once a process control valve coupled to the process line. A manifold for use in refilling an ampoule and purging a fluid supply system is also described.

    Fluid monitoring apparatus
    2.
    发明授权
    Fluid monitoring apparatus 有权

    公开(公告)号：US10288456B2

    公开(公告)日：2019-05-14

    申请号：US14854625

    申请日：2015-09-15

    Applicant: Entegris, Inc.

    Inventor： Thomas H. Baum ,  Ing-Shin Barry Chen ,  Richard D. Chism

    IPC: G01D11/24

    Abstract: A fluid monitoring apparatus, including a circuitry housing containing circuitry for processing fluid sensing signals and responsively transmitting an output, with a sensor assembly adapted for mechanical and electrical coupling to the circuitry housing. The sensor assembly includes at least one sensing member arranged to respond to a fluid species of interest in the monitored fluid, for generation of an output. The apparatus includes at least one of (A) a printed circuit board adapted to engage the circuitry housing and to mechanically couple to the sensor assembly, (B) the sensor assembly including a base and sensing element removably connected to the base by press-fit coupling elements, and (C) the sensor assembly including a base and a sensing filament connected thereto, and a filament guard to protectively circumscribe the sensing filament.

    FLUID MONITORING APPARATUS
    3.
    发明申请
    FLUID MONITORING APPARATUS 审中-公开
    流体监测装置

    公开(公告)号：US20160003651A1

    公开(公告)日：2016-01-07

    申请号：US14854625

    申请日：2015-09-15

    Applicant: ENTEGRIS, INC.

    Inventor： Thomas H. Baum ,  Ing-Shin Barry Chen ,  Richard D. Chism

    IPC: G01D11/24

    CPC classification number: G01D11/245

    Abstract: A fluid monitoring apparatus, including a circuitry housing containing circuitry for processing fluid sensing signals and responsively transmitting an output, with a sensor assembly adapted for mechanical and electrical coupling to the circuitry housing. The sensor assembly includes at least one sensing member arranged to respond to a fluid species of interest in the monitored fluid, for generation of an output. The apparatus includes at least one of (A) a printed circuit board adapted to engage the circuitry housing and to mechanically couple to the sensor assembly, (B) the sensor assembly including a base and sensing element removably connected to the base by press-fit coupling elements, and (C) the sensor assembly including a base and a sensing filament connected thereto, and a filament guard to protectively circumscribe the sensing filament.

    Abstract translation: 一种流体监测装置，包括用于处理流体感测信号并且响应地传输输出的电路壳体，其具有适于机械和电耦合到电路壳体的传感器组件。 传感器组件包括至少一个感测构件，其被布置成响应被监视流体中感兴趣的流体种类，以产生输出。 该装置包括以下中的至少一个：（A）适于接合电路外壳并机械地耦合到传感器组件的印刷电路板中的至少一个;（B）传感器组件，包括基座和感测元件，该基座和感测元件通过压配合可移除地连接到基座 耦合元件，和（C）传感器组件，其包括基座和连接到其上的感测灯丝，以及灯丝防护罩，用于保护地围绕感测灯丝。

    REFILLABLE AMPOULE WITH PURGE CAPABILITY
    5.
    发明申请
    REFILLABLE AMPOULE WITH PURGE CAPABILITY 审中-公开
    具有优势能力的可充电电池

    公开(公告)号：US20160230933A1

    公开(公告)日：2016-08-11

    申请号：US15134548

    申请日：2016-04-21

    Applicant: Entegris, Inc.

    Inventor： Richard D. Chism ,  Andy Krell

    IPC: F17C13/04

    CPC classification number: F17C13/04 ,  C23C14/48 ,  C23C16/44 ,  C23C16/4408 ,  C23C16/4482 ,  C23C16/45561 ,  F17C2205/0335 ,  F17D1/04 ,  G03F7/70 ,  H01L21/67017 ,  Y10T137/0318 ,  Y10T137/877

    Abstract: A fluid delivery system adapted to isolate an ampoule and/or process line during purge, including an inlet control valve connecting a source of pressurized gas to a refillable ampoule, an outlet control valve connecting the refillable ampoule to a location of use, a process control valve connecting a process line to the refillable ampoule, a process isolation valve, and a purge supply valve, e.g., a three-way purge supply valve, arranged between the process isolation valve and the process control valve. A method of purging a fluid delivery system is also disclosed, including closing a process isolation valve, connecting a process line to a refillable ampoule, supplying a purge gas through a purge supply valve, e.g., a three-way purge supply valve, and cycling open and close at least once a process control valve coupled to the process line. A manifold for use in refilling an ampoule and purging a fluid supply system is also described.

    Abstract translation: 流体输送系统，其适于在净化期间隔离安瓿和/或生产线，包括将加压气体源连接到可再填充的安瓿的入口控制阀，连接可再填充的安瓿与使用位置的出口控制阀，过程控制 将过程管线连接到可再填充安瓿的阀门，过程隔离阀和布置在过程隔离阀和过程控制阀之间的净化供给阀，例如三通净化供给阀。 还公开了一种清洗流体输送系统的方法，包括关闭过程隔离阀，将过程管线连接到可再填充的安瓿，通过净化供给阀（例如三通净化供给阀）和循环 打开和关闭至少一次与过程管线相连的过程控制阀。 还描述了用于重新灌注安瓿和清洗流体供应系统的歧管。

Patent Agency Ranking