- 专利标题: Semiconductor device and method of manufacturing the same
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申请号: US15868661申请日: 2018-01-11
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公开(公告)号: US10290646B2公开(公告)日: 2019-05-14
- 发明人: Do Youn Kim
- 申请人: SK hynix Inc.
- 申请人地址: KR Icheon-si, Gyeonggi-do
- 专利权人: SK hynix Inc.
- 当前专利权人: SK hynix Inc.
- 当前专利权人地址: KR Icheon-si, Gyeonggi-do
- 代理机构: William Park & Associates Ltd.
- 优先权: KR10-2016-0018334 20160217
- 主分类号: H01L21/28
- IPC分类号: H01L21/28 ; H01L27/11556 ; H01L21/311 ; H01L27/11519 ; H01L27/11565 ; H01L27/11582 ; H01L27/11524 ; H01L27/1157
摘要:
A semiconductor device and a method of manufacturing a semiconductor device may be provided. The semiconductor device may include first channel layers arranged in a first direction. The semiconductor device may include second channel layers adjacent to the first channel layers in a second direction crossing the first direction and arranged in the first direction. The semiconductor device may include insulating layers stacked while surrounding side walls of the first and second channel layers. The semiconductor device may include conductive layers interposed between the insulating layers, and including first metal patterns extended in the first direction and second metal patterns extended in the first direction while surrounding the side walls of the first channel layers.
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