Invention Grant
- Patent Title: Laterally diffused metal oxide semiconductor field-effect transistor and manufacturing method therefor
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Application No.: US15564181Application Date: 2016-01-29
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Publication No.: US10290705B2Publication Date: 2019-05-14
- Inventor: Feng Huang , Guangtao Han , Guipeng Sun , Feng Lin , Longjie Zhao , Huatang Lin , Bing Zhao
- Applicant: CSMC TECHNOLOGIES FAB2 CO., LTD.
- Applicant Address: CN Wuxi New District, Jiangsu
- Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
- Current Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
- Current Assignee Address: CN Wuxi New District, Jiangsu
- Agency: Hamre, Schumann, Mueller & Larson, P.C.
- Priority: CN201510169433 20150410
- International Application: PCT/CN2016/072853 WO 20160129
- International Announcement: WO2016/161842 WO 20161013
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78 ; H01L21/76 ; H01L29/06 ; H01L21/762

Abstract:
Provided are a laterally diffused metal oxide semiconductor field-effect transistor and a manufacturing method therefor. The method comprises: providing a wafer on which a first N well (22), a first P well (24) and a channel region shallow trench isolating structure (42) are formed; forming a high-temperature oxidation film on the surface of the wafer by deposition; photoetching and dryly etching the high-temperature oxidation film, and reserving a thin layer as an etching buffer layer; performing wet etching, removing the etching buffer layer in a region which is not covered by a photoresist, and forming a mini oxidation layer (52); performing photoetching and ion injection to form a second N well (32) in the first N well and form a second P well (34) in the first P well; forming a polysilicon gate (62) and a gate oxide layer on the surface of the wafer; and photoetching and injecting N-type ions to form a drain electrode (72) and a source electrode (74).
Public/Granted literature
- US20180130877A1 LATERALLY DIFFUSED METAL OXIDE SEMICONDUCTOR FIELD-EFFECT TRANSISTOR AND MANUFACTURING METHOD THEREFOR Public/Granted day:2018-05-10
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