Invention Grant
- Patent Title: Apparatus and methods to create an indium gallium arsenide active channel having indium rich surfaces
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Application No.: US15504280Application Date: 2014-09-19
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Publication No.: US10290709B2Publication Date: 2019-05-14
- Inventor: Glenn A. Glass , Anand S. Murthy , Chandra S. Mohapatra , Tahir Ghani , Willy Rachmady , Gilbert Dewey , Matthew V. Metz , Jack T. Kavalieros
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Green, Howard & Mughal, LLP
- International Application: PCT/US2014/056526 WO 20140919
- International Announcement: WO2016/043769 WO 20160324
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L29/78 ; H01L29/66 ; H01L29/423 ; H01L29/786 ; H01L21/762 ; H01L29/04

Abstract:
Transistor devices having indium gallium arsenide active channels, and processes for the fabrication of the same, that enables improved carrier mobility when fabricating fin shaped active channels, such as those used in tri-gate or gate all around (GAA) devices. In one embodiment, an indium gallium arsenide material may be deposited in narrow trenches which may result in a fin that has indium rich surfaces and a gallium rich central portion. These indium rich surfaces will abut a gate oxide of a transistor and may result in high electron mobility and an improved switching speed relative to conventional homogeneous composition indium gallium arsenide active channels.
Public/Granted literature
- US20170229543A1 APPARATUS AND METHODS TO CREATE AN INDIUM GALLIUM ARSENIDE ACTIVE CHANNEL HAVING INDIUM RICH SURFACES Public/Granted day:2017-08-10
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