Invention Grant
- Patent Title: Method of performing metrology operations and system thereof
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Application No.: US15698585Application Date: 2017-09-07
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Publication No.: US10296702B2Publication Date: 2019-05-21
- Inventor: Ron Katzir , Imry Kissos , Lavi Jacov Shachar , Amit Batikoff , Shaul Cohen , Noam Zac
- Applicant: Applied Materials Israel Ltd.
- Applicant Address: IL Rehovot
- Assignee: APPLIED MATERIALS ISRAEL LTD.
- Current Assignee: APPLIED MATERIALS ISRAEL LTD.
- Current Assignee Address: IL Rehovot
- Agency: Lowenstein Sandler LLP
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G06T7/00 ; G06T7/33 ; G06T3/00 ; G06T7/73

Abstract:
There are provided system and method of performing metrology operations related to a specimen. The method comprises: generating an examination recipe in accordance with a metrology application, the examination recipe specifying one or more metrology objects and one or more metrology operations related to the metrology application; obtaining an image-based representation of the specimen and a design-based representation of the specimen; mapping between the design-based representation of at least first metrology object and the image-based representation of at least first metrology object; and performing at least first metrology operation of the one or more metrology operations according to the examination recipe using the mapping, the at least first metrology operation specified as related to the at least first metrology object and to be performed on at least the image-based representation of the specimen.
Public/Granted literature
- US20180268099A1 METHOD OF PERFORMING METROLOGY OPERATIONS AND SYSTEM THEREOF Public/Granted day:2018-09-20
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