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    Method of performing metrology operations and system thereof
    1.
    发明授权
    Method of performing metrology operations and system thereof 有权

    公开(公告)号：US10296702B2

    公开(公告)日：2019-05-21

    申请号：US15698585

    申请日：2017-09-07

    Applicant: Applied Materials Israel Ltd.

    Inventor： Ron Katzir ,  Imry Kissos ,  Lavi Jacov Shachar ,  Amit Batikoff ,  Shaul Cohen ,  Noam Zac

    IPC: G06F17/50 ,  G06T7/00 ,  G06T7/33 ,  G06T3/00 ,  G06T7/73

    Abstract: There are provided system and method of performing metrology operations related to a specimen. The method comprises: generating an examination recipe in accordance with a metrology application, the examination recipe specifying one or more metrology objects and one or more metrology operations related to the metrology application; obtaining an image-based representation of the specimen and a design-based representation of the specimen; mapping between the design-based representation of at least first metrology object and the image-based representation of at least first metrology object; and performing at least first metrology operation of the one or more metrology operations according to the examination recipe using the mapping, the at least first metrology operation specified as related to the at least first metrology object and to be performed on at least the image-based representation of the specimen.

    Method of inspecting a specimen and system thereof
    2.
    发明授权
    Method of inspecting a specimen and system thereof 有权

    公开(公告)号：US10545490B2

    公开(公告)日：2020-01-28

    申请号：US14727800

    申请日：2015-06-01

    Applicant: Applied Materials Israel Ltd.

    Inventor： Michele Dalla-Torre ,  Amit Batikoff ,  Efrat Rozenman ,  Ron Katzir ,  Imry Kissos

    IPC: G06K9/00 ,  G05B19/418 ,  G06T7/00 ,  G06K9/62

    Abstract: There are provided a method of generating an inspection recipe usable for inspecting an inspection area of a specimen and a recipe generating unit. The recipe generating unit is configured: upon obtaining design data informative of design structural elements comprised in a design PoI corresponding to the at least one PoI, to provide global segmentation of a test image captured by an inspection tool unit from the inspection area and comprising at least one test PoI of substantially the same design as the at least one PoI, thereby to obtain segmented structural elements comprised in the test PoI and segmentation configuration data; to associate the segmented structural elements comprised in the test PoI with the design structural elements comprised in the design PoI, thereby to obtain design association data; and to generate an inspection recipe comprising, at least, segmentation configuration data and design association data.

    Method of performing metrology operations and system thereof
    4.
    发明授权
    Method of performing metrology operations and system thereof 有权

    公开(公告)号：US10571406B2

    公开(公告)日：2020-02-25

    申请号：US16179700

    申请日：2018-11-02

    Applicant: Applied Materials Israel Ltd.

    Inventor： Ron Katzir ,  Imry Kissos ,  Lavi Shachar ,  Amit Batikoff ,  Shaul Cohen ,  Noam Zac

    IPC: G01N21/95

    Abstract: One or more metrology objects and one or more metrology operations may be identified. A design-based representation of a first metrology object of the one or more metrology objects may be received. Furthermore, an image-based representation of the first metrology object of the one or more metrology objects may be received where the one or more metrology operations include a first metrology operation associated with the first metrology object that is to be performed on the image-based representation of the first metrology object. The design-based representation of the first metrology object may be mapped with the image-based representation of the first metrology object. The first metrology operation may be performed based on the mapping.

    Method of performing metrology operations and system thereof
    5.
    发明授权
    Method of performing metrology operations and system thereof 有权

    公开(公告)号：US10120973B2

    公开(公告)日：2018-11-06

    申请号：US15460078

    申请日：2017-03-15

    Applicant: Applied Materials Israel Ltd.

    Inventor： Ron Katzir ,  Imry Kissos ,  Lavi Jacov Shachar ,  Amit Batikoff ,  Shaul Cohen ,  Noam Zac

    IPC: G06F11/22 ,  G06F17/50

    Abstract: There are provided system and method of performing metrology operations related to a specimen. The method comprises: accommodating definitions of metrology objects and metrology operations, at least one of the group consisting of the metrology objects and the metrology operations being defined using design data; accommodating a design-based representation and an image-based representation of the specimen, the design-based representation of the specimen comprising design-based representation of at least first metrology object, the image-based representation of the specimen comprising image-based representation of the at least first metrology object, the metrology operations including at least first metrology operation defined as related to the at least first metrology object and performed on at least the image-based representation of the specimen; mapping between the design-based representation and the image-based representation of the at least first metrology object; and performing the at least first metrology operation according to definition thereof using the mapping.

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