Invention Grant
- Patent Title: Piezoelectric element and device including the same
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Application No.: US15804191Application Date: 2017-11-06
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Publication No.: US10297742B2Publication Date: 2019-05-21
- Inventor: Koji Sumi , Tomohiro Sakai , Tetsuya Isshiki , Toshiaki Takahashi , Kazuya Kitada
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2016-223532 20161116
- Main IPC: H01L41/08
- IPC: H01L41/08 ; H01L41/04 ; H01L41/047 ; H01L41/29 ; B41J2/14 ; H01L41/319 ; H01L41/332 ; H01L41/317 ; B41J2/16 ; H01L41/187 ; H01L41/318
Abstract:
A piezoelectric element includes a first and a second electrode, a piezoelectric layer between the first electrode and the second electrode, and an orientation control layer between the first electrode and the piezoelectric layer. The orientation control layer contains perovskite complex oxide containing potassium, sodium, calcium, and niobium and preferentially oriented in the (100) plane.
Public/Granted literature
- US20180138393A1 PIEZOELECTRIC ELEMENT AND DEVICE INCLUDING THE SAME Public/Granted day:2018-05-17
Information query
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