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    Piezoelectric element and piezoelectric element applied device
    1.
    发明授权
    Piezoelectric element and piezoelectric element applied device 有权

    公开(公告)号：US10181555B2

    公开(公告)日：2019-01-15

    申请号：US15896439

    申请日：2018-02-14

    Applicant: SEIKO EPSON CORPORATION

    Inventor： Kazuya Kitada ,  Koji Sumi ,  Tomohiro Sakai ,  Toshiaki Takahashi

    IPC: B41J2/14 ,  H01L41/187 ,  H01L41/09 ,  H01L41/08

    Abstract: A piezoelectric element includes a first electrode, a second electrode, and a thin piezoelectric layer. The thin piezoelectric layer is provided between the first electrode and the first electrode, and is formed of a perovskite type compound oxide which contains potassium, sodium, and niobium. In the piezoelectric layer, in an X-ray diffraction pattern obtained by θ−2θ measurement, peaks derived from a (002) plane and a (200) plane are provided in a range in which 2θ is from 45° to 47°, a peak position of the peak on a high angle side among the peaks satisfies 46.0°≤2θ≤46.5°, and a difference of 2θ between the peak on the high angle side and the peak on a low angle side is greater than 0.60°.

    Piezoelectric device, liquid ejecting head, and liquid ejecting apparatus
    2.
    发明授权
    Piezoelectric device, liquid ejecting head, and liquid ejecting apparatus 有权

    公开(公告)号：US11485137B2

    公开(公告)日：2022-11-01

    申请号：US17104117

    申请日：2020-11-25

    Applicant: Seiko Epson Corporation

    Inventor： Toshihiro Shimizu ,  Koji Sumi

    IPC: B41J2/14 ,  H01L41/09

    Abstract: A piezoelectric device including a flow path forming substrate in which pressure chambers are formed, a diaphragm, and piezoelectric actuators. Active portions, each having a piezoelectric layer interposed between a first electrode and a second electrode, are each, in plan view, provided from an edge portion opposing the pressure chamber to a portion outside the pressure chamber, and a ratio of a film thickness of the piezoelectric layer to a film thickness of the diaphragm is 4.7 or less.

    Liquid discharge head and printer
    3.
    发明授权
    Liquid discharge head and printer 有权

    公开(公告)号：US11135844B2

    公开(公告)日：2021-10-05

    申请号：US16851198

    申请日：2020-04-17

    Applicant: Seiko Epson Corporation

    Inventor： Motoki Takabe ,  Yasuhiro Itayama ,  Koji Sumi

    IPC: B41J2/14

    Abstract: Provided is a liquid discharge head that includes a nozzle plate provided with a nozzle hole that discharges a liquid, a silicon substrate provided with a pressure generating chamber that communicates with the nozzle hole, a vibration plate provided on the silicon substrate, and a piezoelectric element that is provided on the vibration plate and changes a volume of the pressure generating chamber. The piezoelectric element includes a piezoelectric layer including a composite oxide of a perovskite structure containing lead, zirconium, and titanium. A difference between a peak position derived from a (100) surface of the piezoelectric layer and a peak position derived from a (220) surface of the silicon substrate in an X-ray diffraction of the piezoelectric layer is less than 25.00°.

    Piezoelectric element and liquid ejecting head
    4.
    发明授权
    Piezoelectric element and liquid ejecting head 有权

    公开(公告)号：US10608165B2

    公开(公告)日：2020-03-31

    申请号：US16223392

    申请日：2018-12-18

    Applicant: Seiko Epson Corporation

    Inventor： Tomohiro Sakai ,  Koichi Morozumi ,  Kazuya Kitada ,  Harunobu Koike ,  Koji Sumi

    IPC: H01L41/187 ,  B41J2/14 ,  H01L41/09 ,  H01L41/318 ,  H01L41/08

    Abstract: Provided is a piezoelectric element including a first electrode provided above a substrate, a piezoelectric layer provided above the first electrode, containing potassium, sodium, and niobium, and having a perovskite structure, and a second electrode provided above the piezoelectric layer. In a case where the piezoelectric layer is divided into two portions at a center thereof in a thickness direction, the piezoelectric layer includes a first portion on the first electrode side and a second portion on the second electrode side. The piezoelectric layer includes line defects. A density of the line defects in the second portion is higher than a density of the line defects in the first portion.

    Piezoelectric element and piezoelectric element applied device
    6.
    发明授权
    Piezoelectric element and piezoelectric element applied device 有权

    公开(公告)号：US10186652B2

    公开(公告)日：2019-01-22

    申请号：US15139884

    申请日：2016-04-27

    Applicant: Seiko Epson Corporation

    Inventor： Tomohiro Sakai ,  Koji Sumi ,  Tetsuya Isshiki ,  Toshiaki Takahashi ,  Tomokazu Kobayashi ,  Kazuya Kitada

    IPC: H01L41/04 ,  H01L41/08 ,  H01L41/187 ,  H01L41/318 ,  B41J2/14 ,  H01L41/18

    Abstract: There is provided a piezoelectric element which includes a first electrode, a piezoelectric layer which is formed on the first electrode by using a solution method, and is formed from a compound oxide having a perovskite structure in which potassium, sodium, and niobium are provided, and a second electrode which is provided on the piezoelectric layer. A cross-sectional SEM image of the piezoelectric layer is captured at a magnification of 100,000. When evaluation is performed under a condition in which a measured value in a transverse direction is set to 1,273 nm, two or more voids are included in the piezoelectric layer, a difference between the maximum value and the minimum value among diameters of the voids to be largest in a film thickness direction is equal to or smaller than 14 nm, and the maximum value is equal to or smaller than 24 nm.

    Vibrating plate structure and piezoelectric element application device
    8.
    发明授权
    Vibrating plate structure and piezoelectric element application device 有权

    公开(公告)号：US10600951B2

    公开(公告)日：2020-03-24

    申请号：US15358261

    申请日：2016-11-22

    Applicant: Seiko Epson Corporation

    Inventor： Koji Sumi ,  Eiji Osawa

    IPC: H01L41/08 ,  B06B1/06 ,  B41J2/14 ,  H01L41/09

    Abstract: A vibrating plate is provided between a substrate and a piezoelectric element formed of electrodes and a piezoelectric layer and includes a first layer which is formed of a silicon oxide and a second layer which is formed of a ceramic having a Young's modulus larger than that of the silicon oxide. Under the condition in which the following expression (1) has a constant value, where in the expression (1), Ev1, dv1, Ev2, and dv2 represent Young's modulus of the first layer, the thickness thereof, Young's modulus of the second layer, and the thickness thereof, Ev1×dv12+Ev2×dv22  (1) when the combination of dv1 and dv2 which sets the value of the following expression (2) in a range of from the minimum value to +2% thereof is represented by (Dv1, Dv2), Ev1×dv13+Ev2×dv23  (2) the thickness of the first layer and the thickness of the second layer are represented by Dv1 and Dv2.

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