Invention Grant
- Patent Title: Gas exhaust by-product measurement system
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Application No.: US15691405Application Date: 2017-08-30
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Publication No.: US10302553B2Publication Date: 2019-05-28
- Inventor: Cristian Siladie , Luc Albarede , Yassine Kabouzi , Edward J. McInerney , Sassan Roham
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Beyer Law Group LLP
- Main IPC: G01N21/15
- IPC: G01N21/15 ; G01N21/3504 ; H01L21/67

Abstract:
A gas exhaust by-product measurement system is provided. A gas chamber is configured to receive exhaust from the exhaust output. A light source, light detector, and at least one optical element are positioned so that a light beam from the light source is directed to the at least one optical element a plurality of times before reaching the light detector. At least one heater provides heat to the at least one optical element. A plurality of purge gas nozzles are in fluid connection with the optical cavity. A high flow line is in fluid connection between a purge gas source and the plurality of purge gas nozzles. A low flow line is in fluid connection between the purge gas source and the plurality of purge gas nozzles. At least one flow controller manages a plurality of flow rates including a high flow and a low flow.
Public/Granted literature
- US20190064057A1 GAS EXHAUST BY-PRODUCT MEASUREMENT SYSTEM Public/Granted day:2019-02-28
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