Invention Grant
- Patent Title: Vacuum exhaust system and channel-switching valve used in this vacuum exhaust system
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Application No.: US15541085Application Date: 2016-01-06
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Publication No.: US10309401B2Publication Date: 2019-06-04
- Inventor: Nigel Paul Schofield , Andrew Seeley , Katsumi Nishimura , Katsunori Takahashi
- Applicant: Edwards Limited
- Applicant Address: GB Burgess Hill
- Assignee: Edwards Limited
- Current Assignee: Edwards Limited
- Current Assignee Address: GB Burgess Hill
- Agency: Shumaker & Sieffert, P.A.
- Priority: GB1500133.2 20150106
- International Application: PCT/GB2016/050019 WO 20160106
- International Announcement: WO2016/110695 WO 20160714
- Main IPC: C23C16/44
- IPC: C23C16/44 ; F04C25/02 ; H01L21/67 ; F04C23/00 ; H01L21/205 ; F16K15/00

Abstract:
A vacuum exhaust system which exhausts gas from chambers and which comprises a plurality of branch channels for the exhaustion of the gas from the chambers, a main pipeline in the form of a confluence of the plurality of branch channels, channel open-close valves fitted to correspond with each of the said plurality of branch channels, a channel-switching valve connecting the main channel and a plurality of selection channels and allowing flow between the main channel and any one of the plurality of selection channels, a first pump which functions as a gas exhaust means in the molecular flow region of the gas and is fitted to one of the plurality of branch channels, and second pumps which function as gas exhaust means in the viscous flow region of the gas and are fitted to the plurality of selection channels.
Public/Granted literature
- US20180003178A1 VACUUM EXHAUST SYSTEM AND CHANNEL-SWITCHING VALVE USED IN THIS VACUUM EXHAUST SYSTEM Public/Granted day:2018-01-04
Information query
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