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    Multi-stage turbomolecular pump
    1.
    发明授权
    Multi-stage turbomolecular pump 有权

    公开(公告)号：US12286974B2

    公开(公告)日：2025-04-29

    申请号：US17312787

    申请日：2019-12-11

    Applicant: Edwards Limited

    Inventor： Nigel Paul Schofield ,  Stephen Dowdeswell

    IPC: F04D19/04 ,  F04D19/02 ,  F04D29/02 ,  F04D29/26 ,  F04D29/32 ,  F04D29/58 ,  F04D29/64

    Abstract: A vacuum pump comprising a turbomolecular stage and a drag stage, the vacuum pump comprising a stator and a rotor. The rotor comprises a turbomolecular rotor and a drag rotor attached together. The turbomolecular rotor comprises a hub from which a plurality of blades extend, the hub comprising a mounting portion for mounting to a spindle of a motor and a hollow cylindrical portion, the hollow cylindrical portion extending from the mounting portion towards an outlet end of the turbomolecular stage. The drag rotor comprises a cylindrical skirt and an attachment part extending away from the cylindrical skirt, the attachment part extending within the hollow cylindrical portion of the hub of the turbomolecular rotor and being attached thereto at a point that is closer to the mounting portion than to the outlet end of the turbomolecular rotor.

    ROTOR SUPPORT AND VACUUM PUMP WITH SUCH A ROTOR SUPPORT
    3.
    发明申请
    ROTOR SUPPORT AND VACUUM PUMP WITH SUCH A ROTOR SUPPORT 有权

    公开(公告)号：US20220235778A1

    公开(公告)日：2022-07-28

    申请号：US17617795

    申请日：2020-06-02

    Applicant: Edwards Limited

    Inventor： Nigel Paul Schofield

    IPC: F04D19/04 ,  F04D29/059 ,  F04D29/66

    Abstract: A rotor support configured to rotatably mount a rotor shaft in a vacuum pump is disclosed. The rotor support comprises: a rolling bearing for rotatably supporting the shaft; an insert and at least one resilient damping member, the insert and the at least one resilient damping member surrounding the rolling bearing. The insert comprises inner and outer annular portions connected by a plurality of flexible members, the plurality of flexible members being configured to flex in a radial plane and resist movement in an axial plane, thereby absorbing radial movement of the shaft. The at least one resilient damping member is formed of an elastomeric material configured to flex in both a radial and axial direction.

    VACUUM PUMP
    4.
    发明申请
    VACUUM PUMP 审中-公开
    真空泵

    公开(公告)号：US20150377239A1

    公开(公告)日：2015-12-31

    申请号：US14767523

    申请日：2013-02-15

    Applicant: EDWARDS LIMITED

    Inventor： Nigel Paul Schofield ,  Stephen Dowdeswell

    IPC: F04D19/04 ,  F04D29/32 ,  F04D29/54 ,  F04D29/056

    CPC classification number: F04D19/044 ,  F04D17/168 ,  F04D19/046 ,  F04D23/008 ,  F04D29/056 ,  F04D29/057 ,  F04D29/32 ,  F04D29/541

    Abstract: A vacuum pump may include a regenerative pumping mechanism and a drag pumping mechanism. The regenerative pumping mechanism may include a generally disc-shaped member mounted on an axial shaft for rotation relative to a stator of the regenerative pumping mechanism. The drag pumping mechanism may include a generally cylindrical-shaped member mounted at an outer circumferential portion of the disc-shaped member for rotation about the axial shaft relative to a stator of the drag pumping mechanism.

    Abstract translation: 真空泵可以包括再生泵送机构和牵引泵机构。 再生泵送机构可以包括安装在轴向轴上以相对于再生泵送机构的定子旋转的大致圆盘状构件。 牵引泵机构可以包括安装在盘形部件的外圆周部分处的大致圆柱形的部件，用于相对于牵引泵机构的定子绕轴向转动。

    SCROLL PUMP
    6.
    发明申请
    SCROLL PUMP 有权

    公开(公告)号：US20250109747A1

    公开(公告)日：2025-04-03

    申请号：US18834464

    申请日：2023-03-30

    Applicant: Edwards Limited

    Inventor： Nigel Paul Schofield ,  Alan Ernest Kinnaird Holbrook ,  David Bedwell

    IPC: F04C18/02 ,  F04C29/00

    Abstract: A non-contacting scroll pump, the non-contacting scroll pump comprising a housing, an orbiting scroll located within the housing, and a thrust bearing assembly located within the housing for axially supporting the orbiting scroll. The thrust bearing assembly comprises a first plate fixed to the orbiting scroll, a second plate spaced apart from the first plate, a ball bearing located between the first plate and the second plate, the ball bearing being configured to roll against the first and second plates during orbiting of the orbiting scroll, and a coupling structure extending axially between the housing and the second plate to couple the housing to the second plate, wherein the coupling structure is engaged with the second plate, and wherein the coupling structure comprises a spring arranged to push the coupling structure against the second plate.

    VACUUM PUMP
    8.
    发明申请
    VACUUM PUMP 有权

    公开(公告)号：US20230024392A1

    公开(公告)日：2023-01-26

    申请号：US17791068

    申请日：2021-01-07

    Applicant: Edwards Limited

    Inventor： Nigel Paul Schofield ,  Stephen Dowdeswell

    IPC: F04D19/04 ,  F04D29/54

    Abstract: A vacuum pump comprising: a rotor rotatably mounted within a stator; the rotor comprising a plurality of angled blades arranged along a helical path from an inlet to an outlet; the stator comprising a plurality of perforated elements forming a plurality of perforated discs arranged to intersect the helical path at different axial positions, the perforations allowing gas molecules travelling along the helical path to pass through the perforated elements. Each of the perforated discs comprises an outer curved wall forming an outer circumference of the disc and an inner curved wall forming a portion of an inner circumference of the disc, the inner circumference comprising at least one gap where there is no inner wall.

    Pump assembly with sealing protrusion on stator bore portion
    9.
    发明授权
    Pump assembly with sealing protrusion on stator bore portion 有权

    公开(公告)号：US11421689B2

    公开(公告)日：2022-08-23

    申请号：US16465196

    申请日：2017-12-13

    Applicant: Edwards Limited

    Inventor： Nigel Paul Schofield ,  Alan Ernest Kinnaird Holbrook

    IPC: F16C33/10 ,  F16C33/00 ,  F16C17/02 ,  F16C17/00 ,  F04C18/12 ,  F04C27/00 ,  F04C25/02

    Abstract: A pump assembly may include a rotor having a rotor shaft portion; a stator having a bore portion defining a bore for receiving the rotor shaft portion; and a circumferential protrusion extending radially into the bore between the bore portion and the rotor shaft portion, wherein at least one of the protrusion and a corresponding surface of the rotor shaft portion or the bore portion is configured to be abraded by the other upon experiencing contact therewith. In this way, the gap between the bore portion and the rotor shaft portion may be at least partially filled by the circumferential protrusion in order to provide a seal. The protrusion and one of the bore portion and the rotor shaft portion may be formed from different hardness materials.

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