公开(公告)号：US20180003178A1

公开(公告)日：2018-01-04

申请号：US15541085

申请日：2016-01-06

Applicant: Edwards Limited

Inventor： Nigel Paul Schofield ,  Andrew Seeley ,  Katsumi Nishimura ,  Katsunori Takahashi

IPC: F04C25/02 ,  F04C23/00 ,  C23C16/44 ,  H01L21/205

CPC classification number: F04C25/02 ,  C23C16/4405 ,  C23C16/4412 ,  F04C23/001 ,  F04C23/003 ,  F04C2220/30 ,  F16K15/00 ,  H01L21/205 ,  H01L21/67155

Abstract: A vacuum exhaust system which exhausts gas from chambers and which comprises a plurality of branch channels for the exhaustion of the gas from the chambers, a main pipeline in the form of a confluence of the plurality of branch channels, channel open-close valves fitted to correspond with each of the said plurality of branch channels, a channel-switching valve connecting the main channel and a plurality of selection channels and allowing flow between the main channel and any one of the plurality of selection channels, a first pump which functions as a gas exhaust means in the molecular flow region of the gas and is fitted to one of the plurality of branch channels, and second pumps which function as gas exhaust means in the viscous flow region of the gas and are fitted to the plurality of selection channels.

公开(公告)号：US10309401B2

公开(公告)日：2019-06-04

申请号：US15541085

申请日：2016-01-06

Applicant: Edwards Limited

Inventor： Nigel Paul Schofield ,  Andrew Seeley ,  Katsumi Nishimura ,  Katsunori Takahashi

IPC: C23C16/44 ,  F04C25/02 ,  H01L21/67 ,  F04C23/00 ,  H01L21/205 ,  F16K15/00

Abstract: A vacuum exhaust system which exhausts gas from chambers and which comprises a plurality of branch channels for the exhaustion of the gas from the chambers, a main pipeline in the form of a confluence of the plurality of branch channels, channel open-close valves fitted to correspond with each of the said plurality of branch channels, a channel-switching valve connecting the main channel and a plurality of selection channels and allowing flow between the main channel and any one of the plurality of selection channels, a first pump which functions as a gas exhaust means in the molecular flow region of the gas and is fitted to one of the plurality of branch channels, and second pumps which function as gas exhaust means in the viscous flow region of the gas and are fitted to the plurality of selection channels.