- 专利标题: Range sensor and solid-state imaging device
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申请号: US15562965申请日: 2016-03-31
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公开(公告)号: US10325953B2公开(公告)日: 2019-06-18
- 发明人: Shoji Kawahito
- 申请人: National University Corporation Shizuoka University
- 申请人地址: JP Shizuoka-shi
- 专利权人: National University Corporation Shizuoka University
- 当前专利权人: National University Corporation Shizuoka University
- 当前专利权人地址: JP Shizuoka-shi
- 代理机构: Metrolexis Law Group, PLLC
- 优先权: JP2015-73097 20150331
- 国际申请: PCT/JP2016/001869 WO 20160331
- 国际公布: WO2016/157910 WO 20161006
- 主分类号: H01L31/10
- IPC分类号: H01L31/10 ; H01L27/144 ; H01L27/146 ; G01S7/481 ; H04N5/361 ; H04N5/369 ; H04N5/374 ; H04N5/3745
摘要:
A range sensor includes: an n-type surface-buried region selectively buried in an upper portion of a pixel layer to implement a photodiode and extending from a light-receiving area toward plural portions shielded by a shielding plate along the upper portion of the pixel layer so as to provide a plurality of branches; n-type charge-accumulation regions having a higher impurity concentration than the surface-buried region; a plurality of transfer gate electrodes provided adjacent to the charge-accumulation regions; and an n-type guide region having a higher impurity concentration than the surface-buried region and a lower impurity concentration than the charge-accumulation regions, and provided with one end below an aperture of the shielding plate and other ends extending to a part of the respective transfer gate electrodes.
公开/授权文献
- US20180114809A1 RANGE SENSOR AND SOLID-STATE IMAGING DEVICE 公开/授权日:2018-04-26
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