Invention Grant
- Patent Title: Range sensor and solid-state imaging device
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Application No.: US15562965Application Date: 2016-03-31
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Publication No.: US10325953B2Publication Date: 2019-06-18
- Inventor: Shoji Kawahito
- Applicant: National University Corporation Shizuoka University
- Applicant Address: JP Shizuoka-shi
- Assignee: National University Corporation Shizuoka University
- Current Assignee: National University Corporation Shizuoka University
- Current Assignee Address: JP Shizuoka-shi
- Agency: Metrolexis Law Group, PLLC
- Priority: JP2015-73097 20150331
- International Application: PCT/JP2016/001869 WO 20160331
- International Announcement: WO2016/157910 WO 20161006
- Main IPC: H01L31/10
- IPC: H01L31/10 ; H01L27/144 ; H01L27/146 ; G01S7/481 ; H04N5/361 ; H04N5/369 ; H04N5/374 ; H04N5/3745

Abstract:
A range sensor includes: an n-type surface-buried region selectively buried in an upper portion of a pixel layer to implement a photodiode and extending from a light-receiving area toward plural portions shielded by a shielding plate along the upper portion of the pixel layer so as to provide a plurality of branches; n-type charge-accumulation regions having a higher impurity concentration than the surface-buried region; a plurality of transfer gate electrodes provided adjacent to the charge-accumulation regions; and an n-type guide region having a higher impurity concentration than the surface-buried region and a lower impurity concentration than the charge-accumulation regions, and provided with one end below an aperture of the shielding plate and other ends extending to a part of the respective transfer gate electrodes.
Public/Granted literature
- US20180114809A1 RANGE SENSOR AND SOLID-STATE IMAGING DEVICE Public/Granted day:2018-04-26
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