Invention Grant
- Patent Title: Photographic mask and method for making same
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Application No.: US15070134Application Date: 2016-03-15
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Publication No.: US10331026B2Publication Date: 2019-06-25
- Inventor: Linlin Wang , Ye Zhou , ChengYen Liu , Zhenkui Meng
- Applicant: Linlin Wang , Ye Zhou , ChengYen Liu , Zhenkui Meng
- Applicant Address: CN Shenzhen
- Assignee: AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD.
- Current Assignee: AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD.
- Current Assignee Address: CN Shenzhen
- Agency: IPro, PLLC
- Agent Na Xu
- Priority: CN201510464792 20150731
- Main IPC: G03F1/42
- IPC: G03F1/42 ; G03F1/50

Abstract:
A photographic mask is provided in the present disclosure. The photographic mask includes a silicon-on-insulator (SOI) base and a stepped opening formed in the SOI base. The SOI base includes a silicon substrate, a median layer and a silicon layer, the median layer is arranged between the insulator substrate and the insulator layer. The stepped opening includes a first opening portion and a second opening portion, the first opening portion penetrates through the silicon layer and has a first opening area; the second opening portion at least penetrates through the silicon substrate and is aligned with the first opening portion. The second opening portion has a second opening area greater than the first opening area of the first opening portion. The present disclosure further provides a method for making a photographic mask.
Public/Granted literature
- US20170031238A1 PHOTOGRAPHIC MASK AND METHOD FOR MAKING SAME Public/Granted day:2017-02-02
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