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公开(公告)号：US10331026B2
公开(公告)日：2019-06-25
申请号：US15070134
申请日：2016-03-15
Applicant: Linlin Wang , Ye Zhou , ChengYen Liu , Zhenkui Meng
Inventor： Linlin Wang , Ye Zhou , ChengYen Liu , Zhenkui Meng
Abstract: A photographic mask is provided in the present disclosure. The photographic mask includes a silicon-on-insulator (SOI) base and a stepped opening formed in the SOI base. The SOI base includes a silicon substrate, a median layer and a silicon layer, the median layer is arranged between the insulator substrate and the insulator layer. The stepped opening includes a first opening portion and a second opening portion, the first opening portion penetrates through the silicon layer and has a first opening area; the second opening portion at least penetrates through the silicon substrate and is aligned with the first opening portion. The second opening portion has a second opening area greater than the first opening area of the first opening portion. The present disclosure further provides a method for making a photographic mask.
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Patent Agency Ranking
公开(公告)号：US10051381B2
公开(公告)日：2018-08-14
申请号：US15416980
申请日：2017-01-26
Applicant: Jinyu Zhang , Rui Zhang , Zhenkui Meng
Inventor： Jinyu Zhang , Rui Zhang , Zhenkui Meng
Abstract: A MEMS microphone, includes a base with a back cavity and a capacitor system fixed to the base. The capacitor system includes a back plate above the base and a diaphragm opposite to the back plate for forming an insulated gap. The back plate includes a body part and multiple spaced fixation parts extending from the body part, and the diaphragm includes a vibrating part and a connecting part extending from the vibrating part. An orthographic projection of the body part of the back plate along a vibration direction of the diaphragm is completely located on the diaphragm; and at least a part of an orthographic projection of the fixation parts along the vibration direction is located on the diaphragm.
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公开(公告)号：US20170031238A1
公开(公告)日：2017-02-02
申请号：US15070134
申请日：2016-03-15
Applicant: Linlin Wang , Ye Zhou , ChengYen Liu , Zhenkui Meng
Inventor： Linlin Wang , Ye Zhou , ChengYen Liu , Zhenkui Meng
CPC classification number: G03F1/42 , G03F1/50 , H04R2201/003
Abstract: A photographic mask is provided in the present disclosure. The photographic mask includes a silicon-on-insulator (SOI) base and a stepped opening formed in the SOI base. The SOI base includes a silicon substrate, a median layer and a silicon layer, the median layer is arranged between the insulator substrate and the insulator layer. The stepped opening includes a first opening portion and a second opening portion, the first opening portion penetrates through the silicon layer and has a first opening area; the second opening portion at least penetrates through the silicon substrate and is aligned with the first opening portion. The second opening portion has a second opening area greater than the first opening area of the first opening portion. The present disclosure further provides a method for making a photographic mask.
Abstract translation: 在本公开中提供了一种照相掩模。 摄影掩模包括绝缘体上硅（SOI）基底和形成在SOI基底中的阶梯式开口。 SOI基底包括硅衬底，中间层和硅层，中间层布置在绝缘体衬底和绝缘体层之间。 所述阶梯式开口包括第一开口部和第二开口部，所述第一开口部穿透所述硅层，并具有第一开口面积; 第二开口部分至少穿过硅衬底并与第一开口部分对准。 第二开口部分具有大于第一开口部分的第一开口面积的第二开口面积。 本公开还提供了一种制造照相掩模的方法。
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公开(公告)号：US20150189444A1
公开(公告)日：2015-07-02
申请号：US14584742
申请日：2014-12-29
Applicant: Zhengmin Benjamin Pan , Zhenkui Meng
Inventor： Zhengmin Benjamin Pan , Zhenkui Meng
IPC: H04R17/02
CPC classification number: H04R19/04 , H04R19/005
Abstract: Disclosed is MEMS microphone. The MEMS microphone includes a substrate and a capacitor system disposed on the substrate. The capacitor system has a back plate, a diaphragm, an insulating space formed by the back plate and the diaphragm and at least one insulating support disposed in the insulating space and connected with the back plate or the diaphragm. When the MEMS microphone is working, the insulating support engages with the diaphragm or the back plate thereby dividing the diaphragm into at least two vibrating units which improves the sensitivity and SNR of the MEMS microphone. Meanwhile, the MEMS microphone has the advantage of low cost and is easy to be fabricated.
Abstract translation: 公开了MEMS麦克风。 MEMS麦克风包括设置在基板上的基板和电容器系统。 电容器系统具有背板，隔膜，由背板和隔膜形成的绝缘空间，以及设置在绝缘空间中并与背板或隔膜连接的至少一个绝缘支撑件。 当MEMS麦克风工作时，绝缘支撑件与隔膜或背板接合，从而将隔膜分成至少两个提高MEMS麦克风的灵敏度和SNR的振动单元。 同时，MEMS麦克风具有成本低且易于制造的优点。
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公开(公告)号：US20180115838A1
公开(公告)日：2018-04-26
申请号：US15416980
申请日：2017-01-26
Applicant: Jinyu Zhang , Rui Zhang , Zhenkui Meng
Inventor： Jinyu Zhang , Rui Zhang , Zhenkui Meng
CPC classification number: H04R19/04 , B81B3/0021 , B81B2201/0257 , B81B2203/0127 , B81B2203/0136 , H04R7/04 , H04R19/005 , H04R2201/003 , H04R2410/03 , H04R2499/11
Abstract: A MEMS microphone, includes a base with a back cavity and a capacitor system fixed to the base. The capacitor system includes a back plate above the base and a diaphragm opposite to the back plate for forming an insulated gap. The back plate includes a body part and multiple spaced fixation parts extending from the body part, and the diaphragm includes a vibrating part and a connecting part extending from the vibrating part. An orthographic projection of the body part of the back plate along a vibration direction of the diaphragm is completely located on the diaphragm; and at least a part of an orthographic projection of the fixation parts along the vibration direction is located on the diaphragm.
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公开(公告)号：US09820058B2
公开(公告)日：2017-11-14
申请号：US14584742
申请日：2014-12-29
Applicant: Zhengmin Benjamin Pan , Zhenkui Meng
Inventor： Zhengmin Benjamin Pan , Zhenkui Meng
CPC classification number: H04R19/04 , H04R19/005
Abstract: Disclosed is MEMS microphone. The MEMS microphone includes a substrate and a capacitor system disposed on the substrate. The capacitor system has a back plate, a diaphragm, an insulating space formed by the back plate and the diaphragm and at least one insulating support disposed in the insulating space and connected with the back plate or the diaphragm. When the MEMS microphone is working, the insulating support engages with the diaphragm or the back plate thereby dividing the diaphragm into at least two vibrating units which improves the sensitivity and SNR of the MEMS microphone. Meanwhile, the MEMS microphone has the advantage of low cost and is easy to be fabricated.
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