Invention Grant
- Patent Title: MEMS transducer package
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Application No.: US15538584Application Date: 2015-12-04
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Publication No.: US10334339B2Publication Date: 2019-06-25
- Inventor: John Laurence Pennock , Tsjerk Hoekstra , David Talmage Patten
- Applicant: Cirrus Logic International Semiconductor Ltd.
- Applicant Address: US TX Austin
- Assignee: Cirrus Logic, Inc.
- Current Assignee: Cirrus Logic, Inc.
- Current Assignee Address: US TX Austin
- Agency: Jackson Walker L.L.P.
- International Application: PCT/GB2015/053729 WO 20151204
- International Announcement: WO2016/102925 WO 20160630
- Main IPC: H04R19/00
- IPC: H04R19/00 ; H04R1/04 ; H04R1/28 ; H04R19/04 ; H04R31/00 ; B81B7/00 ; B81C1/00 ; H04R1/34

Abstract:
A MEMS transducer package (1) comprises a semiconductor die element (3) and a cap element (23). The semiconductor die element (3) and cap element (23) have mating surfaces (9, 21). The semiconductor die element (3) and cap element (23) are configured such that when the semiconductor die element (3) and cap element (4) are conjoined, a first volume (7, 27) is formed through the semiconductor die element (3) and into the semiconductor cap element (23), and an acoustic channel is formed to provide an opening between a non-mating surface (11) of the semiconductor die element (3) and a side surface (10, 12) of the transducer package.
Public/Granted literature
- US20170374442A1 MEMS TRANSDUCER PACKAGE Public/Granted day:2017-12-28
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