Invention Grant
- Patent Title: Substituted cyclopentadienyl cobalt complex and method for production thereof, and cobalt-containing thin film and method for production thereof
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Application No.: US16061049Application Date: 2016-12-12
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Publication No.: US10336782B2Publication Date: 2019-07-02
- Inventor: Naoyuki Koiso , Yuki Yamamoto , Hiroyuki Oike , Teppei Hayakawa , Taishi Furukawa , Ken-ichi Tada
- Applicant: TOSOH CORPORATION , SAGAMI CHEMICAL RESEARCH INSTITUTE
- Applicant Address: JP Ayase-shi, Kanagawa
- Assignee: SAGAMI CHEMICAL RESEARCH INSTITUTE
- Current Assignee: SAGAMI CHEMICAL RESEARCH INSTITUTE
- Current Assignee Address: JP Ayase-shi, Kanagawa
- Agency: Nixon & Vanderhye P.C.
- Priority: JP2015-245678 20151216; JP2016-129885 20160630; JP2016-204107 20161018
- International Application: PCT/JP2016/086932 WO 20161212
- International Announcement: WO2017/104619 WO 20170622
- Main IPC: C07F15/06
- IPC: C07F15/06 ; C07F17/00 ; C07F17/02 ; C07F19/00 ; C23C16/18 ; H01L21/02 ; H01L21/28 ; H01L29/45 ; H01L29/49 ; H01L21/285 ; H01L21/768 ; H01L23/532

Abstract:
Provided is a cobalt complex which is useful for the production of a cobalt-containing thin film under conditions where no oxidizing gas is used. A cobalt complex represented by general formula (1) (wherein R1 represents a silyloxy group represented by general formula (2) (wherein R6, R7 and R8 independently represent an alkyl group having 1 to 6 carbon atoms); R2 represents a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, or a silyloxy group represented by general formula (2); R3, R4 and R5 independently represent a hydrogen atom or an alkyl group having 1 to 6 carbon atoms; and L represents a diene having 4 to 10 carbon atoms) is used.
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