Invention Grant
- Patent Title: Methods and systems for selecting recipe for defect inspection
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Application No.: US15411719Application Date: 2017-01-20
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Publication No.: US10338002B1Publication Date: 2019-07-02
- Inventor: Robert M. Danen , Shuo Sun , Thomas Boatwright
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: H01L21/00
- IPC: H01L21/00 ; G01N21/88 ; G01N21/95 ; G06T7/00 ; H01L21/66
Abstract:
Methods and systems for selecting optical modes suitable for defect inspection are disclosed. A method may include: scanning a full-stack wafer of the particular type utilizing a set of optical modes to obtain a set of full-stack wafer images; and de-processing the full-stack wafer to produce a de-processed wafer based on a location of a potential defect of interest indicated by the set of full-stack wafer images to facilitate selection of optical modes suitable for defect inspection of wafers of the particular type.
Information query
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