Invention Grant
- Patent Title: System and method for defining care areas in repeating structures of design data
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Application No.: US15351813Application Date: 2016-11-15
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Publication No.: US10339262B2Publication Date: 2019-07-02
- Inventor: Junqing Huang , Soren Konecky , Hucheng Lee , Kenong Wu , Lisheng Gao
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G03F7/00 ; G03F7/20 ; G01N21/95

Abstract:
A method includes identifying a first set of a first care area with a first sensitivity threshold, the first care area associated with a first design of interest within a block of repeating cells in design data; identifying an additional set of an additional care area with an additional sensitivity threshold, the additional care area associated with an additional design of interest within the block of repeating cells in design data; identifying one or more defects within the first set of the first care areas in one or more images of a selected region of a sample based on the first sensitivity threshold; and identifying one or more defects within the additional set of the additional care areas in the one or more images of the selected region of the sample based on the additional sensitivity threshold.
Public/Granted literature
- US20170286589A1 System and Method for Defining Care Areas in Repeating Structures of Design Data Public/Granted day:2017-10-05
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