Invention Grant
- Patent Title: Low friction coating formed of boron-doped zinc oxide thin film and micromachine
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Application No.: US15576376Application Date: 2016-05-25
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Publication No.: US10343893B2Publication Date: 2019-07-09
- Inventor: Michiko Sasaki , Masahiro Goto , Akira Kasahara , Masahiro Tosa
- Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE
- Applicant Address: JP Ibaraki
- Assignee: NATIONAL INSTITUTE FOR MATERIALS SCIENCE
- Current Assignee: NATIONAL INSTITUTE FOR MATERIALS SCIENCE
- Current Assignee Address: JP Ibaraki
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JP2015-105970 20150526
- International Application: PCT/JP2016/065521 WO 20160525
- International Announcement: WO2016/190375 WO 20161201
- Main IPC: B81B3/00
- IPC: B81B3/00 ; B81B7/02 ; C23C14/08 ; C23C14/35 ; C10M103/06

Abstract:
Low friction coating of the present invention includes a boron-doped zinc oxide thin film, wherein piezoelectric polarization in a vertical direction perpendicular to a film surface and a lateral direction horizontal to the film surface occurs and a magnitude of the piezoelectric polarization in the vertical direction is within 150 pm and a magnitude of the piezoelectric polarization in the lateral direction is within 100 pm at 90% or more of measurement points. This makes it possible to greatly decrease the friction in a nanometer order.
Public/Granted literature
- US20180155183A1 LOW FRICTION COATING FORMED OF BORON-DOPED ZINC OXIDE THIN FILM AND MICROMACHINE Public/Granted day:2018-06-07
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