Invention Grant
- Patent Title: Miniaturized load sensor device having low sensitivity to thermo-mechanical packaging stress, in particular force and pressure sensor
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Application No.: US15464869Application Date: 2017-03-21
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Publication No.: US10345161B2Publication Date: 2019-07-09
- Inventor: Daniele Caltabiano , Mohammad Abbasi Gavarti , Bruno Murari , Roberto Brioschi , Domenico Giusti
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Crowe & Dunlevy
- Priority: IT102016000056318 20160531
- Main IPC: G01L1/18
- IPC: G01L1/18 ; G01L9/00 ; G01L1/04

Abstract:
A load-sensing device is arranged in a package forming a chamber. The package has a deformable substrate configured, in use, to be deformed by an external force. A sensor unit is positioned in direct contact with the deformable substrate and is configured to detect deformations of the deformable substrate. An elastic element within of the chamber is arranged to act between the package and the sensor unit to generate, on the sensor unit, a force keeping the sensor unit in contact with the deformable substrate. The deformable substrate may be a base of the package, and the elastic element may be a metal lamina arranged between the lid of the package and the sensor unit. The sensor unit may be a semiconductor die integrating piezoresistors.
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