Invention Grant
- Patent Title: Doping of selector and storage materials of a memory cell
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Application No.: US16007563Application Date: 2018-06-13
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Publication No.: US10347831B2Publication Date: 2019-07-09
- Inventor: Daniel Gealy , Andrea Gotti , Dale W. Collins , Swapnil A. Lengade
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Compass IP Law, PC
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24 ; G11C13/00

Abstract:
Doping a storage element, a selector element, or both, of a memory cell with a dopant including one or more of aluminum (Al), zirconium (Zr), hafnium (Hf), and silicon (Si), can minimize volume or density changes in a phase change memory as well as minimize electromigration, in accordance with embodiments. In one embodiment, a memory cell includes a first electrode and a second electrode, and a storage element comprising a layer of doped phase change material between the first and second electrodes, wherein the doped phase change material includes one or more of aluminum, zirconium, hafnium, and silicon. The storage element, a selector element, or both can be doped using techniques such as cosputtering or deposition of alternating layers of a dopant layer and a storage (or selector) material.
Public/Granted literature
- US20180337329A1 DOPING OF SELECTOR AND STORAGE MATERIALS OF A MEMORY CELL Public/Granted day:2018-11-22
Information query
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