Invention Grant
- Patent Title: Three-dimensional memory structure having a back gate electrode
-
Application No.: US15379927Application Date: 2016-12-15
-
Publication No.: US10355007B2Publication Date: 2019-07-16
- Inventor: Xiying Costa , Dana Lee , Yanli Zhang , Johann Alsmeier , Yingda Dong , Akira Matsudaira
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: The Marbury Law Group, PLLC
- Main IPC: H01L27/11524
- IPC: H01L27/11524 ; H01L27/11582 ; H01L29/788 ; H01L27/11556 ; H01L29/792 ; H01L27/1157

Abstract:
A memory stack structure includes a cavity including a back gate electrode, a back gate dielectric, a semiconductor channel, and at least one charge storage element. In one embodiment, a line trench can be filled with a memory film layer, and a plurality of semiconductor channels can straddle the line trench. The back gate electrode can extend along the lengthwise direction of the line trench. In another embodiment, an isolated memory opening overlying a patterned conductive layer can be filled with a memory film, and the back gate electrode can be formed within a semiconductor channel and on the patterned conductive layer. A dielectric cap portion electrically isolates the back gate electrode from a drain region. The back gate electrode can be employed to bias the semiconductor channel, and to enable sensing of multinary bits corresponding to different amounts of electrical charges stored in a memory cell.
Public/Granted literature
- US20170098655A1 THREE-DIMENSIONAL MEMORY STRUCTURE HAVING A BACK GATE ELECTRODE Public/Granted day:2017-04-06
Information query
IPC分类: