Invention Grant
- Patent Title: Acoustic resonator and method of manufacturing the same
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Application No.: US15381397Application Date: 2016-12-16
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Publication No.: US10355195B2Publication Date: 2019-07-16
- Inventor: Dae Ho Kim , Dae Hun Jeong , Won Han , Sang Uk Son
- Applicant: Samsung Electro-Mechanics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: NSIP Law
- Priority: KR10-2016-0061047 20160518
- Main IPC: H01L41/053
- IPC: H01L41/053 ; H01L41/047 ; H01L41/27 ; H01L41/297 ; H03H9/17

Abstract:
An acoustic resonator includes: a substrate; a resonance part including a lower electrode, a piezoelectric layer, and an upper electrode sequentially stacked on the substrate, and a frame formed on the upper electrode along an edge of the upper electrode; and a trench part formed in at least one side of the resonance part and making a thickness of the resonance part asymmetrical.
Public/Granted literature
- US20170338399A1 ACOUSTIC RESONATOR AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2017-11-23
Information query
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