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公开(公告)号:US10734968B2
公开(公告)日:2020-08-04
申请号:US15647660
申请日:2017-07-12
Applicant: Samsung Electro-Mechanics Co., Ltd.
Inventor: Tae Kyung Lee , Tae Yoon Kim , Dae Ho Kim , Chang Hyun Lim , Tae Hun Lee , Sang Kee Yoon , Jong Woon Kim , Won Han , Moon Chul Lee
Abstract: A bulk acoustic resonator includes: a substrate including an upper surface on which a substrate protection layer is disposed; and a membrane layer forming a cavity together with the substrate, wherein a thickness deviation of either one or both of the substrate protection layer and the membrane layer is 170 Å or less.
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公开(公告)号:US20150160306A1
公开(公告)日:2015-06-11
申请号:US14218329
申请日:2014-03-18
Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
Inventor: Dae Ho Kim , Eun Tae Park
CPC classification number: G01R33/04 , G01R33/0005
Abstract: There is provided an orthogonal fluxgate sensor including: a magnetic core unit having a lattice structure; first and second coils enclosing the magnetic core unit in a solenoid form; and a third coil surrounding the magnetic core unit and the first and second coils, wherein the first and second coils are disposed to be perpendicular to one another, and when an alternating current (AC) power source is connected to at least one of the first and second coils, an AC voltmeter is connected to the third coil, and when the AC power source is connected to the third coil, the AC voltmeter is connected to at least one of the first and second coils.
Abstract translation: 提供了一种正交磁通门传感器,包括:具有格子结构的磁芯单元; 将磁芯单元以螺线管形式包围的第一和第二线圈; 以及围绕所述磁芯单元和所述第一和第二线圈的第三线圈,其中所述第一和第二线圈彼此垂直地设置,并且当交流(AC)电源连接到所述第一和第二线圈中的至少一个时, 和第二线圈,AC电压表连接到第三线圈,并且当AC电源连接到第三线圈时,AC电压计连接到第一和第二线圈中的至少一个。
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公开(公告)号:US11476826B2
公开(公告)日:2022-10-18
申请号:US15812842
申请日:2017-11-14
Applicant: Samsung Electro-Mechanics Co., Ltd.
Inventor: Won Han , Dae Ho Kim , Yong Suk Kim , Seung Hun Han , Moon Chul Lee , Chang Hyun Lim , Sung Jun Lee , Sang Kee Yoon , Tae Yoon Kim , Sang Uk Son
Abstract: A bulk acoustic wave resonator includes: a substrate; a membrane layer forming a cavity together with the substrate; a lower electrode disposed on the membrane layer; a piezoelectric layer disposed on a flat surface of the lower electrode; and an upper electrode covering a portion of the piezoelectric layer and exposing a side of the piezoelectric layer to air, wherein the piezoelectric layer includes a step portion extended from the side of the piezoelectric layer and disposed on the flat surface of the lower electrode.
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公开(公告)号:US10396755B2
公开(公告)日:2019-08-27
申请号:US15271579
申请日:2016-09-21
Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
Inventor: Sung Han , Dae Ho Kim , Ran Hee Shin , Hwa Sun Lee , Chang Hyun Lim , Tae Kyung Lee , Sung Sun Kim
Abstract: A resonator includes a resonating portion including a first electrode, a second electrode, and a piezoelectric layer positioned between the first electrode and the second electrode; and a frame provided at an outer edge of the resonating portion, at least a portion of the frame covering an outer end portion of the second electrode.
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公开(公告)号:US11251767B2
公开(公告)日:2022-02-15
申请号:US16983209
申请日:2020-08-03
Applicant: Samsung Electro-Mechanics Co., Ltd.
Inventor: Tae Kyung Lee , Tae Yoon Kim , Dae Ho Kim , Chang Hyun Lim , Tae Hun Lee , Sang Kee Yoon , Jong Woon Kim , Won Han , Moon Chul Lee
Abstract: A bulk acoustic resonator includes: a substrate including an upper surface on which a substrate protection layer is disposed; and a membrane layer forming a cavity together with the substrate, wherein a thickness deviation of either one or both of the substrate protection layer and the membrane layer is 170 Å or less.
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公开(公告)号:US10897002B2
公开(公告)日:2021-01-19
申请号:US15824194
申请日:2017-11-28
Applicant: Samsung Electro-Mechanics Co., Ltd.
Inventor: Dae Hun Jeong , Sang Uk Son , Tae Yoon Kim , Dae Ho Kim
IPC: H01L41/047 , H03H9/02 , H01L41/22 , H03H3/02 , H03H9/17 , H03H9/54 , H01L41/187
Abstract: An acoustic resonator includes a resonant portion including a piezoelectric layer disposed between a first electrode and a second electrode, and a frame portion disposed along an outer edge of the second electrode. The frame portion includes three reflective portions reflecting lateral waves generated in the resonant portion.
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公开(公告)号:US10355195B2
公开(公告)日:2019-07-16
申请号:US15381397
申请日:2016-12-16
Applicant: Samsung Electro-Mechanics Co., Ltd.
Inventor: Dae Ho Kim , Dae Hun Jeong , Won Han , Sang Uk Son
IPC: H01L41/053 , H01L41/047 , H01L41/27 , H01L41/297 , H03H9/17
Abstract: An acoustic resonator includes: a substrate; a resonance part including a lower electrode, a piezoelectric layer, and an upper electrode sequentially stacked on the substrate, and a frame formed on the upper electrode along an edge of the upper electrode; and a trench part formed in at least one side of the resonance part and making a thickness of the resonance part asymmetrical.
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8.
公开(公告)号:US20150168503A1
公开(公告)日:2015-06-18
申请号:US14304870
申请日:2014-06-13
Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
Inventor: Dae Ho Kim , Eun Tae Park
IPC: G01R33/02
CPC classification number: G01R33/0286 , G01R33/038 , G01R33/18
Abstract: Disclosed herein are a magnetic field sensor and a sensing apparatus using the same. The present invention provides a magnetic field sensor including: a magnetic field detection unit which includes a substrate, a piezoelectric driving body formed on the substrate, and a magnetostrictive layer stacked on one portion of the piezoelectric driving body and is vibrated at a vibration frequency changed from a natural frequency in proportion to a magnitude of an external magnetic field; and a control unit which drives the piezoelectric driving body with a constant AC voltage and calculates a magnitude of the external magnetic field from an output voltage output from the magnetic field detection unit, and a sensing apparatus using the same.
Abstract translation: 这里公开了一种磁场传感器和使用该磁场传感器的感测装置。 本发明提供一种磁场传感器,包括:磁场检测单元,其包括基板,形成在基板上的压电驱动体和层叠在压电驱动体的一部分上并以振动频率振动的磁致伸缩层 从固有频率与外部磁场的大小成比例; 以及控制单元,其以恒定的AC电压驱动压电驱动体,并且根据从磁场检测单元输出的输出电压和使用其的感测装置计算外部磁场的大小。
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