Invention Grant
- Patent Title: Piezoelectric element, piezoelectric element application device, and method of manufacturing piezoelectric element
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Application No.: US15378474Application Date: 2016-12-14
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Publication No.: US10355196B2Publication Date: 2019-07-16
- Inventor: Tomohiro Sakai , Kazuya Kitada , Koji Sumi
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2016-024082 20160210
- Main IPC: H01L41/27
- IPC: H01L41/27 ; B41J2/14 ; H01L41/047 ; H01L41/083 ; H01L41/187 ; B41J2/16 ; H01L41/08 ; H01L41/318

Abstract:
A piezoelectric element includes a first electrode, a piezoelectric layer formed of a first piezoelectric film which is formed on the first electrode and which includes potassium, sodium, and niobium and a plurality of second piezoelectric films which are formed on the first piezoelectric film and which include potassium, sodium, and niobium, and a second electrode formed on the piezoelectric layer, in which the piezoelectric layer is a stack of a plurality of piezoelectric films, the first piezoelectric film has a thickness of 30 nm to 70 nm, a concentration of sodium in each of the piezoelectric films is along a gradient in the film thickness direction with the first electrode side being high and the second electrode side being low.
Public/Granted literature
Information query
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