Invention Grant
- Patent Title: Ultrasonic transducer electrode assembly
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Application No.: US15965385Application Date: 2018-04-27
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Publication No.: US10357225B2Publication Date: 2019-07-23
- Inventor: Cheryl Rice , Dongjuan Chris Xi
- Applicant: VOLCANO CORPORATION
- Applicant Address: US CA San Diego
- Assignee: VOLCANO CORPORATION
- Current Assignee: VOLCANO CORPORATION
- Current Assignee Address: US CA San Diego
- Main IPC: H01L41/047
- IPC: H01L41/047 ; H01L41/09 ; A61B8/00 ; A61B8/12 ; H01L41/31 ; H01L41/29 ; B06B1/06 ; H01L41/08 ; A61B8/08

Abstract:
The present disclosure provides a method of fabricating an ultrasound transducer. A substrate having a first side and a second side opposite the first side is provided. A bottom electrode is formed over the first side of the substrate. A piezoelectric element is formed over the bottom electrode. The piezoelectric element has a chamfered sidewall. A top electrode is formed over the piezoelectric element. A step metal element is formed over a portion of the top electrode proximate to the chamfered sidewall of the piezoelectric element.
Public/Granted literature
- US20180242949A1 ULTRASONIC TRANSDUCER ELECTRODE ASSEMBLY Public/Granted day:2018-08-30
Information query
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