Invention Grant
- Patent Title: Ultra-high purity storage and dispensing of liquid reagents
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Application No.: US14419458Application Date: 2013-08-07
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Publication No.: US10358263B2Publication Date: 2019-07-23
- Inventor: Donn K. Naito , Andy Krell , Mitchell W. McFeron , Steven Jackson , Joel Robison
- Applicant: ADVANCED TECHNOLOGY MATERIALS, INC.
- Applicant Address: US MA Billerica
- Assignee: Entegris, Inc.
- Current Assignee: Entegris, Inc.
- Current Assignee Address: US MA Billerica
- Agency: Entegris, Inc.
- International Application: PCT/US2013/054025 WO 20130807
- International Announcement: WO2014/025937 WO 20140213
- Main IPC: B65B31/00
- IPC: B65B31/00 ; B65D25/14 ; B01J19/02 ; B01J4/00 ; B65D25/38 ; B65D43/02 ; B65D85/00 ; H01L21/67
Abstract:
A supply vessel for dispensing of ultra-high purity chemical reagents, comprising a metal container defining an enclosable interior volume including interior surface structure, wherein the interior surface structure is coated with an ultra-high purity effective polyperfluoroalkoxyethylene coating. Such supply vessel may for example be utilized for storage and dispensing of ultra-high purity chemical reagent to a semiconductor manufacturing tool, or a tool for manufacturing of flat-panel displays, or solar panels.
Public/Granted literature
- US20150210430A1 ULTRA-HIGH PURITY STORAGE AND DISPENSING OF LIQUID REAGENTS Public/Granted day:2015-07-30
Information query
