公开(公告)号：US10358263B2

公开(公告)日：2019-07-23

申请号：US14419458

申请日：2013-08-07

Applicant: ADVANCED TECHNOLOGY MATERIALS, INC.

Inventor： Donn K. Naito ,  Andy Krell ,  Mitchell W. McFeron ,  Steven Jackson ,  Joel Robison

IPC: B65B31/00 ,  B65D25/14 ,  B01J19/02 ,  B01J4/00 ,  B65D25/38 ,  B65D43/02 ,  B65D85/00 ,  H01L21/67

Abstract: A supply vessel for dispensing of ultra-high purity chemical reagents, comprising a metal container defining an enclosable interior volume including interior surface structure, wherein the interior surface structure is coated with an ultra-high purity effective polyperfluoroalkoxyethylene coating. Such supply vessel may for example be utilized for storage and dispensing of ultra-high purity chemical reagent to a semiconductor manufacturing tool, or a tool for manufacturing of flat-panel displays, or solar panels.