Invention Grant
- Patent Title: Optical measurement of step size and plated metal thickness
-
Application No.: US15346594Application Date: 2016-11-08
-
Publication No.: US10359613B2Publication Date: 2019-07-23
- Inventor: James Jianguo Xu , Ronny Soetarman , Budi Hartono
- Applicant: Zeta Instruments, Inc.
- Applicant Address: US CA Milpitas
- Assignee: KLA-TENCOR CORPORATION
- Current Assignee: KLA-TENCOR CORPORATION
- Current Assignee Address: US CA Milpitas
- Agency: Imperium Patent Works LLP
- Agent Mark D. Marrello
- Main IPC: G02B21/24
- IPC: G02B21/24 ; G02B21/00 ; G02B21/26 ; G02B21/36 ; G06T7/00 ; G06T7/571

Abstract:
A method of generating 3D information includes: varying the distance between the sample and an objective lens of the optical microscope at pre-determined steps, capturing an image at each pre-determined step; determining a characteristic value of each pixel in each captured image; determining, for each captured image, the greatest characteristic value across all pixels in the captured image; comparing the greatest characteristic value for each captured image to determine if a surface of the sample is present at each pre-determined step; determining a first captured image that is focused on a first surface of the sample based on the characteristic value of each pixel in each captured image; determining a second captured image that is focused on a second surface of the sample based on the characteristic value of each pixel in each captured image; and determining a first distance between the first surface and the second surface.
Public/Granted literature
- US20180045946A1 OPTICAL MEASUREMENT OF STEP SIZE AND PLATED METAL THICKNESS Public/Granted day:2018-02-15
Information query