公开(公告)号：US10359613B2

公开(公告)日：2019-07-23

申请号：US15346594

申请日：2016-11-08

Applicant: Zeta Instruments, Inc.

Inventor： James Jianguo Xu ,  Ronny Soetarman ,  Budi Hartono

IPC: G02B21/24 ,  G02B21/00 ,  G02B21/26 ,  G02B21/36 ,  G06T7/00 ,  G06T7/571

Abstract: A method of generating 3D information includes: varying the distance between the sample and an objective lens of the optical microscope at pre-determined steps, capturing an image at each pre-determined step; determining a characteristic value of each pixel in each captured image; determining, for each captured image, the greatest characteristic value across all pixels in the captured image; comparing the greatest characteristic value for each captured image to determine if a surface of the sample is present at each pre-determined step; determining a first captured image that is focused on a first surface of the sample based on the characteristic value of each pixel in each captured image; determining a second captured image that is focused on a second surface of the sample based on the characteristic value of each pixel in each captured image; and determining a first distance between the first surface and the second surface.

公开(公告)号：US20180045946A1

公开(公告)日：2018-02-15

申请号：US15346594

申请日：2016-11-08

Applicant: Zeta Instruments, Inc.

Inventor： James Jianguo Xu ,  Ronny Soetarman ,  Budi Hartono

IPC: G02B21/24 ,  G06T7/00 ,  G02B21/26 ,  G02B21/00 ,  G02B21/36

CPC classification number: G02B21/244 ,  G02B21/0016 ,  G02B21/26 ,  G02B21/367 ,  G06T7/0006 ,  G06T7/571 ,  G06T2207/10028 ,  G06T2207/10056 ,  G06T2207/10148 ,  G06T2207/30148

Abstract: A method of generating 3D information includes: varying the distance between the sample and an objective lens of the optical microscope at pre-determined steps, capturing an image at each pre-determined step; determining a characteristic value of each pixel in each captured image; determining, for each captured image, the greatest characteristic value across all pixels in the captured image; comparing the greatest characteristic value for each captured image to determine if a surface of the sample is present at each pre-determined step; determining a first captured image that is focused on a first surface of the sample based on the characteristic value of each pixel in each captured image; determining a second captured image that is focused on a second surface of the sample based on the characteristic value of each pixel in each captured image; and determining a first distance between the first surface and the second surface.