Invention Grant
- Patent Title: Development processing apparatus, development processing method, and storage medium
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Application No.: US16152603Application Date: 2018-10-05
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Publication No.: US10359702B2Publication Date: 2019-07-23
- Inventor: Takeshi Shimoaoki , Yusaku Hashimoto , Shogo Inaba
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Abelman Frayne & Schwab
- Priority: JP2017-197728 20171011
- Main IPC: G03F7/16
- IPC: G03F7/16

Abstract:
Provided is a development processing apparatus including a rotary holding unit configured to hold and rotate a wafer, a developer supply unit including a nozzle having a liquid contact surface facing a surface of the wafer and an ejection port opening to the liquid contact surface, and a controller. The controller is configured to: while the wafer rotates, execute a control of causing a developer to be ejected from the ejection port and moving the nozzle from an circumference side to a rotation center side of the wafer; after execution of the control, execute a control of moving the nozzle from the rotation center side to the outer circumference side of the wafer; and during execution of the control, execute a control of gradually reducing the rotation speed of the wafer as the center of the liquid contact surface approaches the outer circumference.
Public/Granted literature
- US20190146344A1 DEVELOPMENT PROCESSING APPARATUS, DEVELOPMENT PROCESSING METHOD, AND STORAGE MEDIUM Public/Granted day:2019-05-16
Information query
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