Invention Grant
- Patent Title: Backside contact to a final substrate
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Application No.: US15799862Application Date: 2017-10-31
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Publication No.: US10361123B2Publication Date: 2019-07-23
- Inventor: Jeffrey P. Gambino , Mark D. Jaffe , Steven M. Shank , Anthony K. Stamper
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Sherman IP LLP
- Agent Kenneth L. Sherman; Steven Laut
- Main IPC: H01L21/76
- IPC: H01L21/76 ; H01L21/768 ; H01L23/482 ; H01L21/762 ; H01L23/532 ; H01L27/12 ; H01L29/06 ; H01L29/10 ; H01L21/683 ; H01L21/74

Abstract:
A method for fabricating a backside contact using a silicon-on-insulator substrate that includes a device layer, a buried insulator layer, and a handle wafer. The method includes forming a first switch and a second switch in the device layer. An electrically-conducting connection is formed in a trench. The handle wafer is removed. After the handle wafer is removed, the buried insulator layer is partially removed to expose the electrically-conducting connection. After the buried insulator layer is partially removed, a final substrate is connected to the buried insulator layer such that the electrically-conducting connection contacts the final substrate.
Public/Granted literature
- US20180068891A1 BACKSIDE CONTACT TO A FINAL SUBSTRATE Public/Granted day:2018-03-08
Information query
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