Invention Grant
- Patent Title: Semicondcutor package and manufacturing method thereof
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Application No.: US15884397Application Date: 2018-01-31
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Publication No.: US10361139B2Publication Date: 2019-07-23
- Inventor: Shih-Hao Tseng , Hung-Jui Kuo , Ming-Che Ho , Chia-Hung Liu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- Main IPC: H01L23/495
- IPC: H01L23/495 ; H01L23/31 ; H01L23/498 ; H01L21/48 ; H01L21/56 ; H01L23/00

Abstract:
A semiconductor package includes an encapsulated semiconductor device, a redistribution structure, and a protection layer. The encapsulated semiconductor device includes a semiconductor device and an encapsulating material encapsulating the semiconductor device. The redistribution structure is disposed on the encapsulated semiconductor device and includes a dielectric layer and a redistribution circuit layer electrically connected to the semiconductor device. The protection layer at least covers the dielectric layer, wherein an oxygen permeability or a water vapor permeability of the protection layer is substantially lower than an oxygen permeability or a vapor permeability of the dielectric layer.
Public/Granted literature
- US20190148255A1 SEMICONDCUTOR PACKAGE AND MANUFACTURING METHOD THEREOF Public/Granted day:2019-05-16
Information query
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