- 专利标题: Electronic device and methods of fabricating the same
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申请号: US15465740申请日: 2017-03-22
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公开(公告)号: US10361313B2公开(公告)日: 2019-07-23
- 发明人: Doo Hyeb Youn , Sun Jin Yun , Changbong Yeon , Young-Jun Yu
- 申请人: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- 申请人地址: KR Daejeon
- 专利权人: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- 当前专利权人: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- 当前专利权人地址: KR Daejeon
- 代理机构: Rabin & Berdo, P.C.
- 优先权: KR10-2016-0088867 20160713
- 主分类号: H01L21/04
- IPC分类号: H01L21/04 ; H01L29/16 ; H01L29/24 ; H01L29/45 ; H01L29/66 ; H01L21/445 ; H01L29/772 ; H01L29/786 ; H01L21/4763
摘要:
Disclosed are an electronic device and a method of fabricating the same. The method of fabricating an electronic device comprises providing on a substrate a channel layer including a two-dimensional material, providing a metal fiber layer on a first surface of a conductive layer, providing the metal fiber layer on the channel layer, and performing a thermal treatment process to form a junction layer where a portion of the metal fiber layer is covalently bonded to a portion of the channel layer.
公开/授权文献
- US20180019347A1 ELECTRONIC DEVICE AND METHODS OF FABRICATING THE SAME 公开/授权日:2018-01-18
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