Invention Grant
- Patent Title: Manufacturing method of a light emitting device
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Application No.: US16162528Application Date: 2018-10-17
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Publication No.: US10367174B2Publication Date: 2019-07-30
- Inventor: Takaaki Ishikawa , Takaaki Kamimura , Noriyuki Hirata
- Applicant: Japan Display Inc.
- Applicant Address: JP Tokyo
- Assignee: Japan Display Inc.
- Current Assignee: Japan Display Inc.
- Current Assignee Address: JP Tokyo
- Agency: Michael Best & Friedrich LLP
- Priority: JP2016-153361 20160804
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L51/56 ; C23C14/56 ; H01L21/67 ; C23C14/24 ; H01L27/32 ; H01L51/00

Abstract:
Disclosed is a manufacturing apparatus of a light-emitting element including: a main transporting route extending in a first direction, the main transporting route comprising first and second transfer devices connected through a first transporting chamber; a sub-transporting route extending in a second direction intersecting the first direction, the sub-transporting route comprising a second transporting chamber connected to the first or second transfer device and a delivery chamber connected to the second transfer chamber; and a plurality of first treatment chambers connected to the delivery chamber. The main transporting route is configured to transfer a substrate to be treated in a horizontal state, and one of the plurality of treatment chambers is configured to hold the substrate in a vertical state during treatment.
Public/Granted literature
- US20190051867A1 MANUFACTURING METHOD OF A LIGHT EMITTING DEVICE Public/Granted day:2019-02-14
Information query
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