公开(公告)号：US10367174B2

公开(公告)日：2019-07-30

申请号：US16162528

申请日：2018-10-17

Applicant: Japan Display Inc.

Inventor： Takaaki Ishikawa ,  Takaaki Kamimura ,  Noriyuki Hirata

IPC: H01L21/677 ,  H01L51/56 ,  C23C14/56 ,  H01L21/67 ,  C23C14/24 ,  H01L27/32 ,  H01L51/00

Abstract: Disclosed is a manufacturing apparatus of a light-emitting element including: a main transporting route extending in a first direction, the main transporting route comprising first and second transfer devices connected through a first transporting chamber; a sub-transporting route extending in a second direction intersecting the first direction, the sub-transporting route comprising a second transporting chamber connected to the first or second transfer device and a delivery chamber connected to the second transfer chamber; and a plurality of first treatment chambers connected to the delivery chamber. The main transporting route is configured to transfer a substrate to be treated in a horizontal state, and one of the plurality of treatment chambers is configured to hold the substrate in a vertical state during treatment.

公开(公告)号：US10164218B2

公开(公告)日：2018-12-25

申请号：US15644923

申请日：2017-07-10

Applicant: Japan Display Inc.

Inventor： Takaaki Ishikawa ,  Takaaki Kamimura ,  Noriyuki Hirata

IPC: H01L21/677 ,  H01L51/56 ,  C23C14/56 ,  H01L21/67 ,  C23C14/24 ,  H01L27/32 ,  H01L51/00

Abstract: Disclosed is a manufacturing apparatus of a light-emitting element including: a main transporting route extending in a first direction, the main transporting route comprising first and second transfer devices connected through a first transporting chamber; a sub-transporting route extending in a second direction intersecting the first direction, the sub-transporting route comprising a second transporting chamber connected to the first or second transfer device and a delivery chamber connected to the second transfer chamber; and a plurality of first treatment chambers connected to the delivery chamber. The main transporting route is configured to transfer a substrate to be treated in a horizontal state, and one of the plurality of treatment chambers is configured to hold the substrate in a vertical state during treatment.

公开(公告)号：US10269597B2

公开(公告)日：2019-04-23

申请号：US15599788

申请日：2017-05-19

Applicant: Japan Display Inc.

Inventor： Takaaki Ishikawa ,  Takaaki Kamimura ,  Noriyuki Hirata

IPC: H01L21/67 ,  H01L51/50 ,  H01L51/00 ,  H01L21/677 ,  G05B19/418 ,  H01L51/56

Abstract: Disclosed is a manufacturing apparatus of a light-emitting element. The manufacturing apparatus includes: a main transporting route including a first transfer device and a second transfer device connected to each other through a first transporting chamber; a sub-transporting route extending in a direction intersecting the main transporting route, the sub-transporting route including: a second transporting chamber connected to the first transfer device or the second transfer device; and a delivery chamber connected to the second transporting chamber; and a plurality of treatment chambers connected to the delivery chamber. A region to which the first transfer device, the second transfer device, the first transporting chamber, and the second transporting chamber are connected is under a continuous vacuum environment.