Invention Grant
- Patent Title: Silicon germanium photodetector apparatus and other semiconductor devices including curved-shape silicon germanium structures
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Application No.: US15332877Application Date: 2016-10-24
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Publication No.: US10374118B2Publication Date: 2019-08-06
- Inventor: Luca Alloatti , Rajeev Jagga Ram , Dinis Cheian
- Applicant: Massachusetts Institute of Technology
- Applicant Address: US MA Cambridge
- Assignee: Massachusetts Institute of Technology
- Current Assignee: Massachusetts Institute of Technology
- Current Assignee Address: US MA Cambridge
- Agency: Smith Baluch LLP
- Main IPC: H01L27/14
- IPC: H01L27/14 ; H01L31/18 ; G02B6/12 ; G02B6/293 ; H01L31/0224 ; H01L31/0232 ; H01L31/0312 ; H01L31/0352 ; H01L31/11 ; H01L31/103

Abstract:
Semiconductor devices, such as photonics devices, employ substantially curved-shaped Silicon-Germanium (SiGe) structures and are fabricated using zero-change CMOS fabrication process technologies. In one example, a closed-loop resonator waveguide-coupled photodetector includes a silicon resonator structure formed in a silicon substrate, interdigitated n-doped well-implant regions and p-doped well-implant regions forming multiple silicon p-n junctions around the silicon resonator structure, and a closed-loop SiGe photocarrier generation region formed in a pocket within the interdigitated n-doped and p-doped well implant regions. The closed-loop SiGe region is located so as to substantially overlap with an optical mode of radiation when present in the silicon resonator structure, and traverses the multiple silicon p-n junctions around the silicon resonator structure. Electric fields arising from the respective p-n silicon junctions significantly facilitate a flow of the generated photocarriers between electric contact regions of the photodetector.
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